Optical apparatus

摘要

An optical system capable of obtaining a high-resolution image using interference and thus capable of providing a stable signal is realized. A particular polarization state of response light emitted from an object is selected, and light in the selected particular polarization state is split into two beams. The split two beams are polarized into two different polarization states. After one of the two beams is subjected to an image inversion, the two beams are condensed such that they interfere with each other. The interfering light is split into a plurality of beams, and each of these beams is detected after they are passed through different polarizing filters. Detected signals are combined together and processed to obtain high-stability amplitude information without being influenced by a phase difference between the two beams.

主权项

1. An optical apparatus comprising:
a light source; a condensing optical system configured to condense light emitted from the light source onto an object; a splitting optical system configured to split response light detected from the object into two beams of light; a polarizing optical element configured to polarize the two split beams of response light into different polarization states; an image-inverting optical system disposed in one of optical paths of the two split beams of response light; an element configured to superimpose response light image-inverted by the image-inverting optical system with the other response light thereby generating combined response light; an optical element configured to split the combined response light into a plurality of beams; different polarizing filters disposed in optical paths of the respective split beams of combined response light; detectors configured to detect the respective split beams of combined response light; and a circuit configured to calculate amplitude information and/or phase information by processing signals supplied from the respective detectors.