Motion sensor device and methods for forming the same

摘要

A Micro-Electro-Mechanical System (MEMS) device includes a sensing element, and a proof mass over and overlapping at least a portion of the sensing element. The proof mass is configured to be movable toward the sensing element. A protection region is formed between the sensing element and the proof mass. The protection region overlaps a first portion of the sensing element, and does not overlap a second portion of the sensing element, wherein the first and the second portions overlap the proof mass.

主权项

1. A device comprising:
a Micro-Electro-Mechanical System (MEMS) device comprising:
a sensing element;a proof mass over and overlapping at least a portion of the sensing element, wherein the proof mass is configured to be movable toward the sensing element; anda protection region between the sensing element and the proof mass, wherein the protection region overlaps a first portion of the sensing element, and does not overlap a second portion of the sensing element, and wherein the first and the second portions overlap the proof mass, and wherein the protection region is formed of a material, wherein the material is disposed to regions overlapping a corner region of the proof mass, and wherein none of the material overlaps a center region of the proof mass.