| 摘要 |
<p>The present invention relates to a magnetic sensor test apparatus which includes a wafer which includes a magnetic sensor, a probe card which tests the magnetic sensor, a vertical coil which is arranged on the probe card and forms a magnetic field of a vertical direction on the wafer, and at least a pair of peripheral coils which are arranged on the probe card and are symmetrical around the vertical coil. Thereby, the magnetic sensor is efficiently tested on a semiconductor wafer.</p> |
