Controlled surface roughness in vacuum retention

摘要

An apparatus, particularly a chuck for retaining a thin part for micro-machining processing, is disclosed. The chuck is formed of a plate-shaped body having a first surface and a second surface opposite the first surface. The plate-shaped body includes a light-transmissive material, and at least one of the first surface or the second surface is a roughened surface. The chuck can be incorporated into a micro-machining system using a chuck support that allows light through to backlight a processed part for inspection.

主权项

1. An apparatus for supporting a part to be micro-machined, comprising:
a chuck formed of a plate-shaped body having a first surface that is flat for supporting a flat bottom surface of the part, a second surface opposite the first surface, and an outer edge extending between the first surface and the second surface, the plate-shaped body formed of a light-transmissive material and the first surface being a roughened surface; a chuck support supporting the chuck on a stage of the apparatus, the chuck support having an inner peripheral wall extending about the outer peripheral edge of the chuck to form a vacuum chamber between the inner peripheral wall of the chuck support and the outer peripheral edge of the chuck; at least one vacuum port in pneumatic communication with the roughened surface through the vacuum chamber; and a vacuum source pneumatically coupled to the at least one vacuum port so as to draw a vacuum pressure through the at least one vacuum port, the vacuum chamber and paths formed in the roughened surface to draw the flat bottom surface of the part to the roughened surface.