Nanomechanical testing system

摘要

An automated testing system includes systems and methods to facilitate inline production testing of samples at a micro (multiple microns) or less scale with a mechanical testing instrument. In an example, the system includes a probe changing assembly for coupling and decoupling a probe of the instrument. The probe changing assembly includes a probe change unit configured to grasp one of a plurality of probes in a probe magazine and couple one of the probes with an instrument probe receptacle. An actuator is coupled with the probe change unit, and the actuator is configured to move and align the probe change unit with the probe magazine and the instrument probe receptacle. In another example, the automated testing system includes a multiple degree of freedom stage for aligning a sample testing location with the instrument. The stage includes a sample stage and a stage actuator assembly including translational and rotational actuators.

主权项

1. A method for automatically examining an instrument probe coupled with a mechanical testing instrument configured to performing mechanical testing at micron scale or less, the method comprising:
determining if an instrument probe use threshold is achieved, the instrument probe is coupled with a transducer, and the transducer is configured to move the instrument probe, measure an instrument probe indentation depth and measure force applied to the instrument probe through the transducer, and determining if the instrument probe use threshold is achieved includes one or more of:
counting a number of transducer operations, anddetermining if the number of transducer operations is greater than a transducer operation count threshold, ormeasuring one or more of the instrument probe indentation depth, force applied to the instrument probe through the transducer or a sample mechanical parameter of a sample, anddetermining the instrument probe use threshold is met if one or more of the instrument probe indentation depth, force applied to the instrument or the sample mechanical parameter is outside of one or more of a specified indentation depth threshold range, a specified force threshold range or a specified sample mechanical parameter threshold range of the sample; and conducting a probe check operation once the instrument probe use threshold is achieved, the probe check operation includes:
aligning the instrument probe with a diagnostic sample,indenting the instrument probe into the diagnostic sample,measuring one or more of the indentation depth, indentation force or a sample mechanical parameter with the transducer, anddetermining the instrument probe requires one of calibration or replacement if one or more of the measured indentation depth, the measured indentation force or the sample mechanical parameter are outside of an indentation threshold range, an indentation force threshold range or a sample mechanical parameter threshold range of the diagnostic sample, respectively.