发明名称 System for fabricating nanoscale probe and method thereof
摘要 Disclosed is a method for fabricating a nanoscale probe. A first conductor and a second conductor are immersed into an electrolyte contained in an electrolytic tank. The first conductor and the second conductor are connected to a power source respectively. An electrolytic reaction is established when an electrical circuit is established between the first conductor and the second conductor. The second conductor is configured to output electrons. The first conductor is configured to receive electrons. Therefore, the first conductor is etched when the electrical circuit is established between the first conductor and the second conductor. A necking portion is created at the first conductor approximately near the surface of the electrolyte. A nanoscale probe is fabricated when first conductor breaks at the necking portion.
申请公布号 US8966661(B2) 申请公布日期 2015.02.24
申请号 US201313948991 申请日期 2013.07.23
申请人 Academia Sinica 发明人 Chang Wei-Tse;Hwang Ing-Shouh
分类号 G01Q70/10;G01Q70/16;B82Y35/00 主分类号 G01Q70/10
代理机构 Muncy, Geissler, Olds & Lowe, P.C. 代理人 Muncy, Geissler, Olds & Lowe, P.C.
主权项 1. A method for fabricating a nanoscale probe, comprising: immersing a first conductor into an electrolyte, wherein the first conductor is connected to an anode; immersing a second conductor into the electrolyte, wherein the second conductor is connected to a cathode; forming a necking portion at the first conductor approximately near the surface of the electrolyte by a power source outputting a direct current voltage establishing an electrical circuit between the first conductor and the second conductor; and delivering a plurality of voltage pulses by the power source to reduce the dimension of the necking portion, wherein the electrical circuit is not terminated before the first conductor breaks substantially from the necking portion, wherein the nanoscale probe has a body and a tip protruding from the body, wherein profiles of the nanoscale probe include at least a radius of curvature of the tip, a taper angle of the tip, a length of the tip, an aspect ratio of the nanoscale probe, and a diameter of the body, wherein the nanoscale probe having predetermined profiles is fabricated by adjusting the establishment of the electrical circuit between the first conductor and the second conductor.
地址 Taipei TW