发明名称 Resistant strain gauge
摘要 The invention relates to measurement and control of mechanical values, in particular, to control of stress conditions of various structures and manufacturing sensors of resistant strain gauge type for measuring various mechanical values. It can be used in manufacturing sensors of deformation, force, pressure, movement, vibration etc. to increase accuracy in resistant strain gauge measuring at sensitivity preservation. The resistant strain gauge for deformation and pressure measuring represents a dielectric substrate with spread strain-sensing layer in state of polycrystalline film, which contains samarium sulfide, and metal contact pads. Pads are placed on the same side of a film and output signals are soldered to them. Strain-sensing layer comprises holes which connect the pads. According to the first option, strain-sensing layer has the following composition Sm1−xLnxS, where Ln is one from the elements: La, Ce, Pr, Nd, Gd, Tb, Dy, Ho, Er, Tm, Lu, Y, at 0<x<0.3. According to the second option, strain-sensing layer has the following composition Sm1+zS, where 0<z<0.17.
申请公布号 US8963263(B2) 申请公布日期 2015.02.24
申请号 US201214116767 申请日期 2012.05.07
申请人 SmS tenzotherm GmbH 发明人 Kaminskii Vladimir Vasil'evich;Golubkou Alexander Vasil'evich;Mikhailovich Volodin Nikolay;Mikhailovich Soloviev Sergey
分类号 G01P15/08;H01L21/00;G01L1/22;G01B7/16;H01L41/047 主分类号 G01P15/08
代理机构 代理人 Wilford Andrew
主权项 1. A resistant strain gauge for measuring deformation and pressure comprising: a dielectric substrate; a polycrystalline strain-sensing layer deposited on the substrate and containing Samarium Sulphide; metal contacts positioned on one side of the strain-sensing layer; electrical wires connected to the contacts, the strain-sensing layer having openings extending from one contact to the other, the material of the strain-sensing layer being Sm1−xLnxS, where 0<x<0.3 and Ln is La, Ce, Pr, Nd, Gd, Tb, Dy, Ho, Er, Tm, Lu, or Y.
地址 Dortmund DE