摘要 |
The invention relates to measurement and control of mechanical values, in particular, to control of stress conditions of various structures and manufacturing sensors of resistant strain gauge type for measuring various mechanical values. It can be used in manufacturing sensors of deformation, force, pressure, movement, vibration etc. to increase accuracy in resistant strain gauge measuring at sensitivity preservation. The resistant strain gauge for deformation and pressure measuring represents a dielectric substrate with spread strain-sensing layer in state of polycrystalline film, which contains samarium sulfide, and metal contact pads. Pads are placed on the same side of a film and output signals are soldered to them. Strain-sensing layer comprises holes which connect the pads. According to the first option, strain-sensing layer has the following composition Sm1−xLnxS, where Ln is one from the elements: La, Ce, Pr, Nd, Gd, Tb, Dy, Ho, Er, Tm, Lu, Y, at 0<x<0.3. According to the second option, strain-sensing layer has the following composition Sm1+zS, where 0<z<0.17. |
主权项 |
1. A resistant strain gauge for measuring deformation and pressure comprising:
a dielectric substrate; a polycrystalline strain-sensing layer deposited on the substrate and containing Samarium Sulphide; metal contacts positioned on one side of the strain-sensing layer; electrical wires connected to the contacts, the strain-sensing layer having openings extending from one contact to the other, the material of the strain-sensing layer being Sm1−xLnxS, where 0<x<0.3 and Ln is La, Ce, Pr, Nd, Gd, Tb, Dy, Ho, Er, Tm, Lu, or Y. |