发明名称 Semiconductor pointed structure and method for fabricating same, spot size converter, and non-reflective terminator
摘要 A semiconductor pointed structure formed at an end portion of the core structure of a semiconductor photonic wire waveguide has a sloped side wall on at least one of the sides that constitute the pointed structure. The semiconductor pointed structure decreases in width and thickness towards the distal end. A method for fabrication of the structure is also disclosed.
申请公布号 US8965157(B2) 申请公布日期 2015.02.24
申请号 US201313800770 申请日期 2013.03.13
申请人 National Institute of Advanced Industrial Science and Technology 发明人 Sakakibara Youichi;Takei Ryohei;Mori Masahiko;Kamei Toshihiro
分类号 G02B6/26;G02B6/136;G02B6/122;G02B6/30;G02B6/24 主分类号 G02B6/26
代理机构 Hayes Soloway P.C. 代理人 Hayes Soloway P.C.
主权项 1. A silicon pointed structure formed at an end portion of a core structure of a silicon photonic wire waveguide, and having a sloped side wall on at least one of the sides constituting a pointed structure, wherein the silicon pointed structure has a width and thickness decreasing towards a distal end thereof, and wherein the shape of the cross section in proximity to the distal end is triangular.
地址 JP