Pressure sensing and control for semiconductor wafer probing

摘要

A wafer probing system includes a probe card assembly having a plurality of individual probe structures configured make contact with a semiconductor wafer mounted on a motor driven wafer chuck, with each probe structure configured with a pressure sensing unit integrated therewith; and a controller configured to drive the probe card assembly with one or more piezoelectric driver units response to feedback from the pressure sensing units of the individual probe structures.

主权项

1. A wafer probing system, comprising:
a probe card assembly having a plurality of individual probe structures configured make contact with a semiconductor wafer mounted on a motor driven wafer chuck, with each probe structure configured with a pressure sensing unit integrated therewith, the probe card assembly including a plurality of zones, each zone including at least one respective probe structure; and a controller configured to drive at least one probe structure of a first zone of the probe card assembly with one or more piezoelectric driver units independently with respect to at least one probe structure of a second zone of the probe card assembly in response to feedback from the pressure sensing units of the individual probe structures, the controller further configured to drive the at least one probe structure of a respective zone until based on contact between a surface of wafer and the at least one probe structure of a respective zone.