| 发明名称 | Contamination reduction electrode for particle detector | ||
| 摘要 | A charged particle detector arrangement is described. The detector arrangement includes a detection element and a collector electrode configured to collect charged particles released from the detection element upon impact of signal charged particles. | ||
| 申请公布号 | US8963084(B2) | 申请公布日期 | 2015.02.24 |
| 申请号 | US201414204278 | 申请日期 | 2014.03.11 |
| 申请人 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik GmbH | 发明人 | Lanio Stefan |
| 分类号 | H01J37/244;H01J37/28 | 主分类号 | H01J37/244 |
| 代理机构 | Patterson & Sheridan, LLP | 代理人 | Patterson & Sheridan, LLP |
| 主权项 | 1. A charged particle detector arrangement, comprising: a detection element configured to produce a charged particle signal; a collector electrode configured to collect charged particles released from the detection element upon impact of signal charged particles; and a voltage supply connected to the detection element to accelerate the signal charged particles towards the detection element. | ||
| 地址 | Heimstetten DE | ||