Method of manufacturing liquid transporting apparatus

摘要

There is provided a method of manufacturing liquid transporting apparatus including: providing a channel unit; providing a piezoelectric actuator having a first and second active portion corresponding to a central portion and an outer periphery portion of the pressure chamber, respectively. The first and second active portions are sandwiched between an upper electrode and an intermediate electrode, and between the upper electrode and a lower electrode, respectively. The method further includes joining the channel unit and the piezoelectric actuator by positioning such that the intermediate electrode overlaps the central portion of the pressure chamber. Accordingly, since it is possible to make the first active portion overlap the central portion of the pressure chamber, it is possible to apply a appropriate pressure to the liquid in the pressure chamber without excessively small deformation of the first active portion.

主权项

1. A method of manufacturing a liquid transporting apparatus which transports a liquid, comprising:
providing a channel unit in which liquid transporting channels, each including a pressure chamber, are formed; providing a piezoelectric actuator which applies a pressure to the liquid in the pressure chambers, including:
providing a piezoelectric layer having, for each pressure chamber, a first active portion corresponding to a central portion of the pressure chamber, and a corresponding second active portion corresponding to a portion at an outer periphery of the central portion of the pressure chamber; andarranging a, plurality of individual electrodes to each of which a first electric potential and a second electric potential different from the first electric potential are applied selectively and each corresponding to one of the pressure chambers, a first constant electric potential electrode to which the first electric potential is applied, and a second constant electric potential electrode to which the second electric potential is applied, such that each first active portion is sandwiched between one of the individual electrodes and the first constant electric potential electrode, and that each corresponding second active portion is sandwiched between the same individual electrode and the second constant electric potential electrode; and joining the channel unit and the piezoelectric actuator by positioning the first constant electric potential electrode of the piezoelectric actuator to be overlapped with the central portions of the pressure chambers of the channel unit; wherein the plurality of individual electrodes is arranged on a first plane.