Electromechanical conversion element, manufacturing method thereof, piezoelectric type actuator, liquid droplet jetting head, and inkjet recording apparatus

摘要

An electromechanical conversion element for converting an electric signal into mechanical displacement or converting mechanical displacement into an electric signal, includes a bottom electrode in which an alumina film, a metal film, and a conductive oxide film are sequentially laminated; an electromechanical conversion film disposed on the conductive oxide film of the bottom electrode; and a top electrode disposed on the electromechanical conversion film, wherein the metal film is solid.

主权项

1. An electromechanical conversion element for converting an electric signal into mechanical displacement or converting mechanical displacement into an electric signal, the electromechanical conversion element comprising:
a bottom electrode in which an alumina film, a metal film, and a conductive oxide film are sequentially laminated; an electromechanical conversion film disposed on the conductive oxide film of the bottom electrode; and a top electrode disposed on the electromechanical conversion film.