Microelectromechanical device having an oscillating mass and method for controlling a microelectromechanical device having an oscillating mass

摘要

A microelectromechanical device includes a body, a movable mass, elastically connected to the body and movable in accordance with a degree of freedom, and a driving device, coupled to the movable mass and configured to maintain the movable mass in oscillation at a steady working frequency in a normal operating mode. The microelectromechanical device moreover includes a start-up device, which is activatable in a start-up operating mode and is configured to compare a current oscillation frequency of a first signal correlated to oscillation of the movable mass with a reference frequency, and for deciding, on the basis of the comparison between the current oscillation frequency and the reference frequency, whether to supply to the movable mass a forcing signal packet so as to transfer energy to the movable mass.

主权项

1. A system comprising:
a substrate; a first mass elastically coupled to the substrate; a second mass elastically coupled to the first mass; a driving device coupled to the first mass, the driving device configured to move the first mass with a driving movement in a first operating mode and a second operating mode, the driving device including:
a start-up device configured to be active during the second operating mode;an oscillator configured to provide a reference clock signal to the start-up device, the start-up device configured to continuously compare a current oscillation frequency of the first mass and a frequency of the reference clock signal; anda forcing device coupled to the start-up device, the forcing device being configured to be active during the second operating mode and configured to be inactive during the first operating mode, the start-up device configured to activate the forcing device during the second operating mode based on the comparison between the current oscillation frequency and the frequency of the reference clock signal, the forcing device being configured to transfer energy packets to the first mass during the second operating mode.