Electrolytic process using cation permeable barrier

摘要

Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and an anode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, an anode, a second processing fluid, and a cation permeable barrier layer. The cation permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain cationic species to transfer between the two fluids. The described processes produce deposits over repeated plating cycles that exhibit deposit properties (e.g., resistivity) within desired ranges.

主权项

1. A process for electrolytically processing a microfeature workpiece as the working electrode with a first processing fluid and a counter electrode, comprising:
providing a microfeature workpiece comprising a nonmetallic substrate having a dielectric layer disposed over a substrate and a continuous metal feature disposed on the dielectric layer and having microfeatures comprising recessed structures; contacting a surface of the microfeature workpiece with the first processing fluid, the first processing fluid comprising first processing fluid species including at least one metal cation, an anion, and a complexing agent; contacting the counter electrode with a second processing fluid; producing an electrochemical reaction at the counter electrode; electrolytically depositing the metal cation onto the surface of the microfeature workpiece; substantially preventing movement of anionic and complexing agent species between the first processing fluid and the second processing fluid; and depositing the at least one metal cation as metal into the recessed structures on the surface of the microfeature workpiece.