Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics

摘要

Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.

主权项

1. A rotational sensor comprising:
a sense substrate; an actuator layer; the actuator layer comprising at least two proof masses capable of rotating about a Z-axis normal to plane of the sense substrate wherein each of the at least two proof masses being anchored to the sense substrate via at least one flexure; at least two transducers that can sense rotation of the at least two proof masses about Z-axis; and a circuit coupled to the at least two transducers to provide an output related to the rotation of the rotational sensor.