| 摘要 |
PROBLEM TO BE SOLVED: To provide means for reducing resolution deterioration caused by gas in an environmental control type transmission electron microscope.SOLUTION: Since the resolution deterioration is not a function of the current density of a sample 114 but of the total current of the beam of electrons, it is concluded that the resolution deterioration is due to ionization of gas within a sample chamber 138 of an environmental control type transmission electron microscope 100. An electric field is then applied into the sample chamber 138, the ionized gas is removed and the resolution deterioration is diminished. The electric field need not be a strong field and, for example, it is enough to apply a bias voltage of about 100 V to the sample 114 via a power source 144 in the sample chamber 138. Otherwise, an electric field perpendicular to an optical axis 104 can be used by placing an electrically biased wire or gauze off-axis in a state of removing the optical axis 104 in the sample chamber 138. |
