| 摘要 |
This specification discloses a recipro type evaporating system for manufacturing an organic light emitting diode (OLED) panel. The evaporating system comprises: a buffer for storing an OLED substrate; a plurality of sorters which are located at an upper portion and receive the substrate from the buffer, wherein the sorters can operate independently; a transfer system which is located at the upper portion and transfers the substrate to the sorters and a buffer for a next process; a linear evaporation source which is located at a lower portion and performs a uniform evaporation during a reciprocal linear movement; a rail which is located at the lower portion and forms a movement path for the linear evaporation source; and a vacuum chamber system including the sorters, the transfer system, the linear evaporation source, and the rail. Since a cluster is removed from the evaporation system using a precise sorter, compensation for substrate angles on respective evaporators by a center moving robot is not required. Therefore, the overall system is simplified and an installation space can be optimized. |
