| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an inspection unit capable of accurately inspecting damage in an object to be inspected irrespective of damage orientation by minimizing effect of the damage orientation.SOLUTION: An inspection unit 11 comprises: light-emitting means G1 in which a plurality of LEDs 15 are arranged in a row; an illumination optical system G3 that illuminates a film F in a row by guiding illumination light from the light-emitting means G1 toward the film F; light-guiding means G2 that is disposed between the light-emitting means G1 and the illumination optical system G3, and in which the illumination light from the light-emitting means G1 is incident on an incident end surface 16a and is guided to the illumination optical system G3; and a line sensor 20b that obtains an image of the illuminated film F. In the light-guiding means G2, a plurality of gaps 17 are disposed at positions corresponding to the plurality of LEDs 15 so as to prevent illumination light incident on the incident end surface 16a from adjacent LEDs 15 from mixing with each other in the light-guiding means G2.</p> |
