摘要 |
PROBLEM TO BE SOLVED: To enable integration of an integrated circuit and a working electrode mainly containing carbon.SOLUTION: An electrochemical sensor includes: a semiconductor substrate 10 where an integrated circuit 11 is formed; and a working electrode 32 mainly containing carbon which is formed on a surface of the semiconductor substrate 10, where the integrated circuit 11 is formed, and is electrically connected to the integrated circuit 11. A method of manufacturing the electrochemical sensor includes the steps of: forming the working electrode 32 which mainly contains carbon on a support 30; forming an intermediate layer 28 on a surface, where the integrated circuit 11 is formed, of the semiconductor substrate 10 having the integrated circuit 11 formed; transferring the working electrode 32 from the support 30 onto the intermediate layer 28; and electrically connecting the working electrode 32 with the integrated circuit 11. |