| 摘要 |
PROBLEM TO BE SOLVED: To provide a pellicle frame body for suppressing deflection of a large-sized mask, and a pellicle.SOLUTION: The large-sized pellicle frame body 2 has an almost rectangular opening 2a of 20,000-40,000 cmarea and at least one pair of opposite long sides 4. First concave groove parts 8, each of which has the length equal to or longer than 4.0% and shorter than 10% of that of the long side 4, are formed on the outer side face 4a of each of the long sides 4. The flatness of the long side is equal to or smaller than 250 μm. |
