| 摘要 |
<p>The present invention provides a perfluorinated compound treatment system comprising: a chamber through which perfluorinated compounds (PFCs) flows in and then flow out; an electron beam irradiation device for irradiating the inside of the chamber by an electron beam to decompose the PFCs; a shielding film installed inside the chamber to prevent the direct irradiation of the electron beam onto a rear surface of the shielding film; and a catalyst layer disposed in a space above the rear surface of the shielding film to decompose the PFCs which are not decomposed by the electron beam, wherein the catalyst layer is heated by heat generated from the electron beam, thereby having improved activity.</p> |
