| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron spectrometer capable of easily performing angular-resolved photoemission spectroscopy.SOLUTION: An electron spectrometer 100 includes: an electron capture unit 4 which captures the electrons emitted from a sample S; an energy spectral unit 6 which sorts the electrons captured by the electron capture unit 4 in terms of energy; and a detection unit 8 which detects the electrons sorted by the spectral unit 6. The electron capture unit 4 includes: a front lens 42 for capturing the electrons emitted from the sample; an aperture 44 arranged behind the front lens 42; a first rear lens 46 arranged behind the aperture 44; a rear deflection elements 47a and 47b arranged behind the first rear lens 46 and deflecting electrons; a second rear lens 48 arranged behind the rear deflection elements 47a and 47b; and an incident slit 49 arranged behind the second rear lens 48. The first rear lens 46 and the second rear lens 48 form a diffraction surface on the incident slit 49. |
