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发明名称
強誘電体膜、成膜方法及び強誘電体膜の製造方法
摘要
非鉛の材料からなる強誘電体膜を作製することを課題とする。本発明の一態様による強誘電体膜は、Ｋ、Ｎａ、Ｎｂ及びＯを有するものであって、詳細には、ペロブスカイト構造からなる（Ｋ１−ＸＮａＸ）ＮｂＯ３膜１２であり、Ｘは下記式を満たす。０．３≦̸Ｘ≦̸０．７
申请公布号
JPWO2012169078(A1)
申请公布日期
2015.02.23
申请号
JP20130519340
申请日期
2011.06.07
申请人
株式会社ユーテック
发明人
木島 健;本多 祐二
分类号
C01G33/00
主分类号
C01G33/00
代理机构
代理人
主权项
地址
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