发明名称 MANUFATURING DEVICE OF ORGANIC LIGHT EMITTING DIODE DISPLAY AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DIODE DISPLAY USING THE SAME
摘要 <p>An apparatus and a method for fabricating an organic light emitting display are provided. According to an embodiment of the present invention, an apparatus for fabricating an organic light emitting display includes: a chamber; a stage disposed in the chamber and having a hollow; a displacement sensor disposed on the stage and configured to measure a distance between the stage and an object to be measured that is positioned on an upper part of the stage; and a controller. The controller includes: an input unit configured to receive distance information obtained by the displacement sensor; a memory unit configured to store reference distance information; a determination unit configured to compare the reference distance information with the distance information received by the input unit; and an output unit configured to output a control signal on the basis of information determined by the determination unit. Thus, the occurrence of a gap error between the stage and a mask frame may be grasped in real time during a process as well as before the process.</p>
申请公布号 KR20150018258(A) 申请公布日期 2015.02.23
申请号 KR20130094940 申请日期 2013.08.09
申请人 发明人
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
代理机构 代理人
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