Fe-Co BASED ALLOY SPUTTERING TARGET MATERIAL, SOFT MAGNETIC THIN FILM LAYER AND PERPENDICULAR MAGNETIC RECORDING MEDIUM USING SOFT MAGNETIC THIN FILM LAYER

摘要

PROBLEM TO BE SOLVED: To provide: an Fe-Co based alloy sputtering target material capable of stably performing magnetron sputtering without generating particles for soft magnetic film formation; a method for manufacturing the same; a soft magnetic thin film layer; and a perpendicular magnetic recording medium using the soft magnetic thin film layer.SOLUTION: The sputtering target material made of Fe-Co based alloy includes one kind or two kinds or more of Nb, Ta, Mo and W as an M element and the remainder consisting of one kind or two kinds of Fe and Co and inevitable impurities and satisfies a following formula (1) having atomic ratios of 0≤X≤100 and 4≤Y≤28. The micro-structure of the sputtering target material has a phase mainly containing Fe and Co and an intermetallic compound phase consisting of one kind or two kinds of Fe and Co and the M element. The phase mainly containing Fe and Co is divided by the intermetallic compound phase consisting of one kind or two kinds of Fe and Co and the M element. (Fe-Co)M(1)