| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic bearing device in which an S/N ratio of displacement information can be improved.SOLUTION: In the magnetic bearing device, a second carrier wave signal applied to a sensor 71y on a Y1 axis is set in such a way that a phase differs in a (&pgr;/2+&thetas;) radian with respect to a first carrier wave signal applied to a sensor 71x on an X1 axis, a first modulation signal output from the first sensor 71x is sampled at sampling timing which is deviated by a phase &thetas; from timing at which the first carrier wave signal reaches a peak, and a second modulation signal output from the second sensor 71y is sampled at sampling timing which is deviated by a phase (-&thetas;) from timing at which the second carrier wave signal reaches a peak. As a result, a noise component caused by the interference of an adjacent shaft can be removed. |
