DRAWING DATA GENERATING METHOD, PROCESSING APPARATUS, STORAGE MEDIUM, DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

摘要

Provided is a method of generating drawing data to be drawn in a substrate using a plurality of charged particle beams based on pattern data representing a pattern to be drawn in the substrate. The method includes the steps of: grouping the charged particle beams into a plurality of groups in an irradiation position of the charged article beams based on the variation from a target position; and generating the drawing data by changing the pattern data with respect to each group based on the variation of each charged particle beam.