发明名称 METHOD OF SUPERCONDUCTIVE NANOELEMENTS MANUFACTURING WITH TUNNEL OR JOSEPHSON JUNCTIONS
摘要 FIELD: electricity.SUBSTANCE: method of superconductive nanoelements manufacturing with tunnel or Josephson junctions includes formation of nanoelements of substances having superconductive properties and their transformation to non-conducting ones at the selected dividing area with the preset width due to selective change of atomic composition by impact of accelerated beam through protecting mask with the preset relief.EFFECT: potential improvement of productivity.9 cl, 2 dwg
申请公布号 RU2541679(C1) 申请公布日期 2015.02.20
申请号 RU20130132810 申请日期 2013.07.16
申请人 FEDERAL'NOE GOSUDARSTVENNOE BJUDZHETNOE UCHREZHDENIE "NATSIONAL'NYJ ISSLEDOVATEL'SKIJ TSENTR "KURCHATOVSKIJ INSTITUT" 发明人 GUROVICH BORIS ARONOVICH;KULESHOVA EVGENIJA ANATOL'EVNA;PRIKHOD'KO KIRILL EVGEN'EVICH;TARKHOV MIKHAIL ALEKSANDROVICH
分类号 H01L39/24;B82B3/00 主分类号 H01L39/24
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