DIFFRACTION GRATING

摘要

FIELD: physics.SUBSTANCE: diffraction grating for the visible range comprises a substrate with a periodic diffraction microstructure embedded in the surface thereof, wherein elements of said microstructure are regions subjected to ion irradiation and are characterised by a different permittivity from the material of the substrate. The substrate is made of optically transparent dielectric or semiconductor material. The periodic diffraction microstructure comprises ion-synthesised metal nanoparticles dispersed in the surface region of the substrate on a layer thickness of 20 to 100 nm with metal concentration of 3·10-6·10atoms/cm.EFFECT: improved contrast and enabling use for both reflected and transmitted light.8 dwg