| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vibration type transducer that is formed without adsorbing an oscillator to a first layer, allows accurate detection of stress, and has a characteristic whose variation is small, and to provide a method of manufacturing the transducer.SOLUTION: A shell 14 includes, in a region in which a first layer 26 faces a second layer 27, a clearance part 31 that communicates a portion E1 facing an opening of a through hole 25 on the first layer 26 side with a portion E2 in which the second layer 27 is in contact with a third layer 28. The first layer 26 has the through hole 25 whose inside is hollow. This prevents reduction in measurement accuracy that is caused by the variation in characteristic or deformation of the shell, due to the adsorption of an oscillator 12 to the first layer 26 or a polysilicon layer deposited in a vacuum chamber.</p> |
