| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vibration piece whose vibration arm does not contact with a lid even when the vibration piece is mounted in a package, or the like, and which is capable of obtaining high accuracy and high reliability.SOLUTION: A vibration piece includes: a base unit 14 having a packaging surface 14a; vibration arms 16 (16a, 16b, and 16c) that extend from the base unit 14, have a first surface 17a and a second surface 17b that faces the first surface 17a and is located on a side of the packaging surface 14a, and perform bending vibration in a normal direction of the first surface 17a and the second surface 17b; and a laminate structure that is disposed at least one of the first surface 17a and the second surface 17b of the vibration arm 16 and has at least a first electrode 20, a second electrode 38 and a piezoelectric layer 28 arranged between the first electrode 20 and the second electrode 38, where the vibration arm 16 is curved to the side of the packaging surface 14a.</p> |
