| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a positioning device capable of compensating a dynamic displacement of a movable body due to a dynamic displacement of a structure caused by driving the movable body.SOLUTION: A positioning device includes: a movable body; a feeding device having a guide mechanism unit for guiding the movable body in a feeding axis direction and a drive mechanism unit for moving the movable body; a structure 2 for supporting the feeding device; a control device 20 for controlling actuation of the drive mechanism unit to control a movement position of the movable body with respect to a reference position; a derivation unit 28 for deriving a dynamic displacement of the movable body with respect to the reference position in the feeding axis direction due to a dynamic displacement of the structure 2 caused by driving the movable body; and an addition unit 27 for creating correction data for canceling the dynamic displacement on the basis of the derived displacement data to add the created correction data to a control signal of the control device 20.</p> |
