DETECTING ARCING USING PROCESSING CHAMBER DATA

摘要

A method and apparatus for detecting substrate arcing and breakage within a processing chamber is provided. A controller monitors chamber data, e.g., parameters such as RF signals, voltages, and other electrical parameters, during operation of the processing chamber, and analyzes the chamber data for abnormal spikes and trends. Using such data mining and analysis, the controller can detect broken substrates without relying on glass presence sensors on robots, but rather based on the chamber data.

主权项

1. A method for operating a processing chamber, the method comprising:
generating a threshold value associated with a first chamber parameter according to historical chamber data obtained during processing of prior substrates in the processing chamber; receiving the first chamber parameter during processing of a first substrate according to a stage of a recipe; and determining at least one of a breakage exists in the first substrate or arcing has occurred in the processing chamber while processing the first substrate in response to determining the first chamber parameter exceeds the threshold value.