发明名称 ELASTIC WAVE DEVICE
摘要 Provided is an elastic wave device wherein a leak failure of hollow sections which elastic wave element sections face is not easily generated. Disclosed is an elastic wave device (1) wherein: a plurality of elastic wave element sections, each of which has an IDT electrode, are configured on a piezoelectric substrate (2); a supporting layer (16) that surrounds the elastic wave element sections is provided on the piezoelectric substrate (2) such that hollow sections, which the elastic wave element sections face, are formed; the hollow sections, which the elastic wave element sections face, are configured by laminating a cover member on the supporting layer (16); the supporting layer (16) has a first supporting layer (17) and a second supporting layer (18), and the first supporting layer (17) is provided along an outer circumferential end of the piezoelectric substrate (2), and the second supporting layer (18) is positioned in a region surrounded by the first supporting layer (17), and is provided around the elastic wave element sections so as to have the hollow sections that have the elastic wave element sections therein; and a hollow path (19) is provided between the first supporting layer (17) and the second supporting layer (18), said hollow path (19) being provided to have at least two hollow sections communicate with each other.
申请公布号 WO2015022856(A1) 申请公布日期 2015.02.19
申请号 WO2014JP69905 申请日期 2014.07.29
申请人 MURATA MANUFACTURING CO., LTD. 发明人 HIRA, MITSUYOSHI;KAI, SEIJI
分类号 H03H9/25;H01L23/02 主分类号 H03H9/25
代理机构 代理人
主权项
地址