发明名称 SYSTEM AND METHOD FOR ATTACHING A MASK TO A MASK HOLDER
摘要 A system for coupling a mask to a mask holder. The system includes a base, an aperture; mask holder cover supporting elements arranged to move between a first position and a third position while supporting the mask holder cover; mask supporting elements arranged to move between a fourth position and a sixth position while supporting the mask; mask holder base supporting elements arranged to support the mask holder base. When the mask holder cover supporting elements are at the first position and the mask supporting elements are at the third position the mask holder cover, the mask and the base are spaced apart from each other. When the mask holder cover supporting elements are at the third position and the mask supporting elements are at the sixth position the mask holder cover, the mask and the base are connected to each other.
申请公布号 WO2015023606(A1) 申请公布日期 2015.02.19
申请号 WO2014US50596 申请日期 2014.08.11
申请人 APPLIED MATERIALS ISRAEL, LTD.;APPLIED MATERIALS, INC. 发明人 AVNERI, ISRAEL;KRIVTS (KRAYVITZ), IGOR;UZIEL, YORAM;DODZIN, NIR BEN-DAVID;HOLCMAN, IDO
分类号 G03F7/14;H01L21/30 主分类号 G03F7/14
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