| 发明名称 |
MICROMIRROR SYSTEM AND METHOD OF MANUFACTURING A MICROMIRROR SYSTEM |
| 摘要 |
A micromirror system that includes a chip frame, at least one spring element, and at least one mirror plate oscillatorily suspended in the chip frame via the at least one spring element. The chip frame and the at least one spring element include at least one microchannel which is provided with an inlet opening and an outlet opening for leading through a flowing coolant. |
| 申请公布号 |
US2015049374(A1) |
申请公布日期 |
2015.02.19 |
| 申请号 |
US201314386744 |
申请日期 |
2013.03.20 |
| 申请人 |
Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung e.V. |
发明人 |
Hofmann Ulrich;Quenzer Hans-Joachim;Janes Joachim;Jensen Björn |
| 分类号 |
G02B26/08;G02B7/182;B32B38/00;B32B37/16;B32B38/10;G02B7/18;G02B1/12 |
主分类号 |
G02B26/08 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
Munchen DE |
