OPTICAL SUBSTRATE, SEMICONDUCTOR LIGHT-EMITTING ELEMENT AND METHOD OF MANUFACTURING SEMICONDUCTOR LIGHT-EMITTING ELEMENT

摘要

In an optical substrate (1), a concave-convex structure (12) including a plurality of independent convex portions (131 to 134) and concave portions (14) provided between the convex portions (131 to 134) is provided in a surface. The average interval Pave between the adjacent convex portions (131 to 134) in the concave-convex structure (12) satisfies 50 nm≦Pave≦1500 nm, and the convex portion (133) having a convex portion height hn satisfying 0.6 h≧hn≧0 h for the average convex portion height Have is present with a probability Z satisfying 1/10000≦Z≦1/5. When the optical substrate (1) is used in a semiconductor light-emitting element, dislocations in a semiconductor layer are dispersed to reduce the dislocation density, and thus internal quantum efficiency IQE is improved, and a waveguide mode is removed by light scattering and thus the light the extraction efficiency LEE is increased, with the result that the efficiency of light emission of the semiconductor light-emitting element is enhanced.

主权项

1. An optical substrate that includes a substrate and a concave-convex structure which is formed in a part or a whole of a surface of the substrate,
wherein at least one region of the concave-convex structure includes a plurality of convex portions arranged apart from each other, and the plurality of convex portions include a plurality of first convex portions having a first height and a plurality of second convex portions having a second height lower than the first height, an average interval Pave between the first convex portions adjacent satisfies formula (1) below and
50 nm≦Pave≦1500 nm  Formula (1) the second convex portion has a convex portion height hn that satisfies a relationship of formula (2) below with an average convex portion height Have of the concave-convex structure, and is present with a probability Z that satisfies formula (3) below in the concave-convex structure:
0.6 Have≧hn≧0  Formula (2)1/10000≦Z≦1/5.  Formula (3)