发明名称 OPERATION NUMBER-COUNTING PIEZOELECTRIC DISPENSER
摘要 The present invention relates to an operation number-counting piezoelectric dispenser, more specifically to a dispenser equipped with a piezoelectric pump for dispensing a solution by using a piezoelectric element as an actuator. An operation number-counting piezoelectric dispenser according to the present invention allows a piezoelectric actuator to be replaced before damage occurs thereto by preemptively predicting same, thereby preventing process loss and production of defective products, and thus has the benefit of enhancing productivity.
申请公布号 WO2015023101(A1) 申请公布日期 2015.02.19
申请号 WO2014KR07471 申请日期 2014.08.12
申请人 PROTEC CO., LTD 发明人 HONG, SEUNG MIN;LEE, HANSUNG;LEE, YONG HUN;KIM, MIN SUN
分类号 F04B43/04;B05B17/06;F04B49/06;H01L21/02 主分类号 F04B43/04
代理机构 代理人
主权项
地址