发明名称 |
OPERATION NUMBER-COUNTING PIEZOELECTRIC DISPENSER |
摘要 |
The present invention relates to an operation number-counting piezoelectric dispenser, more specifically to a dispenser equipped with a piezoelectric pump for dispensing a solution by using a piezoelectric element as an actuator. An operation number-counting piezoelectric dispenser according to the present invention allows a piezoelectric actuator to be replaced before damage occurs thereto by preemptively predicting same, thereby preventing process loss and production of defective products, and thus has the benefit of enhancing productivity. |
申请公布号 |
WO2015023101(A1) |
申请公布日期 |
2015.02.19 |
申请号 |
WO2014KR07471 |
申请日期 |
2014.08.12 |
申请人 |
PROTEC CO., LTD |
发明人 |
HONG, SEUNG MIN;LEE, HANSUNG;LEE, YONG HUN;KIM, MIN SUN |
分类号 |
F04B43/04;B05B17/06;F04B49/06;H01L21/02 |
主分类号 |
F04B43/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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