发明名称 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor device which controls a threshold value; and provide a semiconductor device which can inhibit deterioration in electrical characteristics, which notably occurs in association with microfabrication.SOLUTION: A semiconductor device comprises: a first semiconductor film; a source electrode and a drain electrode, which electrically contact the first semiconductor film; a gate insulation film; and a gate electrode which contacts the gate insulation film. The gate insulation film includes a first insulation film and a trap film, and a charge trap level at a boundary face between the first insulation film and the trap film, or inside the trap film is caused to trap charges.</p>
申请公布号 JP2015035593(A) 申请公布日期 2015.02.19
申请号 JP20140136434 申请日期 2014.07.02
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 TANAKA TETSUHIRO;INOUE TAKAYUKI;YAMAMOTO YOSHITAKA;SUZAWA HIDEOMI;MORIWAKA YOSHIE
分类号 H01L29/786;H01L21/336;H01L21/8238;H01L21/8242;H01L27/08;H01L27/092;H01L27/108 主分类号 H01L29/786
代理机构 代理人
主权项
地址