发明名称 |
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a semiconductor device which controls a threshold value; and provide a semiconductor device which can inhibit deterioration in electrical characteristics, which notably occurs in association with microfabrication.SOLUTION: A semiconductor device comprises: a first semiconductor film; a source electrode and a drain electrode, which electrically contact the first semiconductor film; a gate insulation film; and a gate electrode which contacts the gate insulation film. The gate insulation film includes a first insulation film and a trap film, and a charge trap level at a boundary face between the first insulation film and the trap film, or inside the trap film is caused to trap charges.</p> |
申请公布号 |
JP2015035593(A) |
申请公布日期 |
2015.02.19 |
申请号 |
JP20140136434 |
申请日期 |
2014.07.02 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
TANAKA TETSUHIRO;INOUE TAKAYUKI;YAMAMOTO YOSHITAKA;SUZAWA HIDEOMI;MORIWAKA YOSHIE |
分类号 |
H01L29/786;H01L21/336;H01L21/8238;H01L21/8242;H01L27/08;H01L27/092;H01L27/108 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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