| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an inversion device configured to stably invert a substrate.SOLUTION: A support member 4 movably supports a first holding member 2a and a second holding member 2b so that first and second holding surfaces 21a, 21b are close to and away from each other. The first holding member 2a and the second holding member can be integrally rotated so that the first holding surface faces a second direction opposite a first direction.</p> |
