Pump Having an Automated Gas Removal and Fluid Recovery System and Method Using a Gas Removal Reservoir Having an Internal Partition

摘要

A precision pump system having a motor driver for accurately and repeatedly delivering process fluid, (e.g., photo chemicals) using a pumping fluid with minimal process fluid loss to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished with the use of a gas removal reservoir having at least one vertical partition therein and at least one free end near a top side of the gas removal reservoir where both the input and output to the gas removal reservoir are located on a bottom surface and a pumping fluid reservoir that are associated with the pump, either integrated with the pump or closely adjacent. In addition, this precision pump system can be remotely monitored, viewed and controlled over the Internet. In addition, trapped process fluid within a downstream filtering block can be recirculated to the gas removal reservoir when trapped gas in the filter is removed. Furthermore, a nitrogen gas source is connected to the gas removal reservoir via a valve in case a need to insert a gas is required. Alternative system embodiments are shown for recirculating process fluid back to the gas removal reservoir and/or the source line. Another alternative system has the pumping chamber coupled to the gas removal reservoir input.

主权项

1. An automated pump system for removing gas from a process fluid to be dispensed, said pump system comprising:
a gas removal reservoir having a process fluid therein:
at least one vertical partition that separates said reservoir into at least two sub-reservoirs having a fluid channel positioned at a free end portion of said at least one vertical partition for permitting process fluid to pass between said at least two sub-reservoirs;a first inlet coupled to a remote process fluid source;an outlet;a second inlet coupled to a process fluid recirculation path coupled to a drain; andat least one vent coupled to the drain; a driving means indirectly coupled to said outlet for driving the process fluid into or out of said gas removal reservoir; valves coupled to said inlet and to said outlet for permitting process fluid flow into and out of said gas removal reservoir, and coupled to said at least one vent to remove gas out of said gas removal reservoir and into the drain, and coupled to said second inlet for recirculating process fluid away from said drain and into said gas removal reservoir; a sensor for providing a signal corresponding to a parameter in said pump system related to the presence of gas in said gas removal reservoir; and a processor coupled to said driving means, to said sensor and to said valves, said processor using said signal to automatically control said valves and said driving means to force any gas in said gas removal reservoir through said at least one vent and into the drain.