METHOD FOR PRODUCING TRANSMISSION ELECTRON MICROSCOPY SPECIMEN USING TRIPOD POLISHING AND FOCUSED ION BEAMS

摘要

The present invention relates to a method for producing a transmission electron microscopy specimen. The method for producing a specimen, according to the present invention, produces a transmission electron microscopy specimen by polishing a bulk specimen into a wedge shape, using a focused ion beam to finely etch the front and rear surface of at least one area of the polished specimen, and cleaning the finely etched specimen. The present invention enables a transmission electron microscopy specimen to be produced in a stable manner and reduces the amount of time required for production.