| 摘要 |
<p>The present invention pertains to the achievement of a charged particle beam device that can be used easily even by a beginner, is such that observations can be made without awareness of complicated observation conditions including the height and tilt of a sample stage, and is able to set minute observation conditions when advanced observations are desired. For example, the charged particle beam device has: an expansion cancelling mode that displays at an image display unit an operating region such that the field of view of the sample image is operated to move in the rotational direction and up, down, left, and right, maintains a set height for the sample stage, and maintains a horizontal sample stage tilt angle; and a function expanding mode that displays at the image display unit an operating region such that the field of view of the sample image is operated to move in the rotational direction and up, down, left, and right, and is operated with respect to the height and tilt angle of the sample stage. For example, there are an expansion cancelling mode such that the spacing between the sample stage and the tip of a charged particle optical system and the tilt of the sample stage cannot be operated, and a function expanding mode such that any given 3D movement, tilt, and rotation of the sample stage can be operated, and it is possible to switch between the expansion cancelling mode and the function expanding mode.</p> |
