| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a semiconductor container washing and drying machine capable of improving drying efficiency and shortening drying time by preventing air leakage from a supply valve.SOLUTION: A semiconductor container washing and drying machine 1 includes a main chamber 5 which accommodates a semiconductor container main body 3 and a door 4, and performs washing and drying; a nozzle 6 which is provided in the main chamber 5 and jets washing water or drying air; a supply pipe 8 which is provided outside the main chamber 5 and includes a supply valve 7 for supplying washing water or drying air to the nozzle 6; an exhaust port 10 which is provided in the main chamber 5 and connected with an exhaust pipe 9 for evacuating the main chamber 5; and a sub-chamber 39 which accommodates the supply valve 7 and is evacuated to a pressure equal to or close to the pressure in the main chamber 5.</p> |
