| 摘要 |
<p>The present invention relates to a method and a device for producing a transmission electron microscopy specimen. The method for producing a transmission electron microscopy specimen, according to the present invention, produces a transmission electron microscopy specimen by: joining multiple layers of silicon substrates using an epoxy that has been mixed with a sample, and then applying heat and pressure thus preparing a hardened laminated sample; polishing the prepared laminated sample to a prescribed thickness, cutting the polished laminated sample into a disk shape in the direction vertical to the lamination direction of the sample, thus producing a disk-shaped specimen filled into a copper tube; and then etching a specific area of the disk-shaped specimen using a focused ion beam. The present invention enables specimens for porous materials and fibrous materials to be rapidly produced.</p> |
