DRAWING DATA GENERATION METHOD, PROCESSING DEVICE, PROGRAM, DRAWING DEVICE AND ARTICLE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a drawing data generation method advantageous to cope with both high drawing accuracy and reduced drawing data.SOLUTION: Drawing data for drawing a picture on a substrate with a plurality of charged particle beams is generated from pattern data representing a pattern to be drawn on the substrate. A method for generating the drawing data includes: a grouping step of grouping the plurality of charged particle beams into a plurality of groups on the basis of an amount of deviation from a target position of the radiation position of each charged particle beam; and a generation step of generating the drawing data for each group by changing the pattern data on the basis of the amount of deviation.