| 摘要 |
PROBLEM TO BE SOLVED: To facilitate deposition of contaminants in a path without spoiling the high response speed of a sensor by relaxing restrictions on design to make the path narrower and complicated.SOLUTION: Many flow channel formation plates 72 are laminated between a top plate 71 and a base plate 73 to constitute a baffle structure (a cylindrical structure having one end closed) 70. On each of the flow channel formation plates 72, a plurality of flow channel grooves (paths penetrating between an inner peripheral surface and an outer peripheral surface of the plate 72) 72b radially extending from the axial center of the plate 72 are formed. In the baffle structure 70, a measurement object fluid introduced to the inner peripheral surface side flow out to the outer peripheral surface side through the flow channel grooves 72b in respective layers, and flows of the measurement object fluid flowing to the outer peripheral surface side join together and are sent to a sensor diaphragm. Flow channel grooves may be formed on the top plate 71 and the base plate 73 also. The measurement object fluid may be made to flow from the outer peripheral surface side to the inner peripheral surface side. |
