| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam monitor system capable of performing accurate position identification and improving accuracy of a determination as appropriate irradiation.SOLUTION: The beam monitor system includes a plurality of groups each defining a plurality of wire electrodes in which charge collection electrodes are adjacent to each other, as one group. Each wire electrode is connected to a channel of a signal processing device in such a manner that at least two channels are not physically continued, for all the wire electrodes and continuous measurement channels which are collected at a certain degree, by wires as many as the wire electrodes belonging to the group so as to input from the same wiring a detection signal outputted from one wire electrode selected from among the groups. Further, a signal processing device 22 calculates group information indicating the group to which the wire electrode that outputs an inputted detection signal belongs, outputs a processing signal including the group information to a beam monitor control device and calculates a position and a beam width of a charged particle beam passing through the wire electrode. |
