IMPRINT METHOD AND IMPRINT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an imprint method for forming with high accuracy a pattern structure body using a mold having a mesa structure and/or a transfer substrate and to provide an imprint device.SOLUTION: The imprint method that uses a mold having a mesa structure and/or a transfer substrate includes: a resin supply step; a contact step; a hardening step; a mold release step; and an inspection step for inspecting a mold after the mold release step and a pattern structure body. In the inspection step, presence or absence of pattern structure body protrusion is inspected and a step afterward is determined.