| 摘要 |
[Problem] To suppress metal contamination that occurs, after cleaning, on a cleaned surface of a substrate due to scraping of a nozzle path inner wall. [Solution] According to one embodiment of the present invention, a nozzle (11) from which CO2 particles are to be jetted to a substrate is characterized in that a hard film having a Vickers hardness of Hv 1,000-5,000 is formed on an inner wall of the nozzle (11). |
